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The science and engineering of microelectronic fabrication

Campbell, 1954-

The science and engineering of microelectronic fabrication / Stephen A. Campbell. - 2nd ed.. - New York Oxford University Press 2001. - xiv, 603p. ill. 24cm

ISBN: 0195136055

Subjects--Topical Terms:
Semiconductors--Design and construction

Dewey Class. No.: 621.38152 CAM 2001

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