Semiconductor manufacturing handbook

Semiconductor manufacturing handbook / Hwaiyu Geng, editor in chief. - New York McGraw-Hill 2005. - 1v. (various pagings) ill. 25cm

Includes index

0071445595


Integrated circuits--Design and construction--Handbooks, manuals, etc.
Semiconductors--Design and construction--Handbooks, manuals, etc.

621.38152 SEM 2005