Principles of microelectromechanical systems
Principles of microelectromechanical systems
/ edited by Ki Bang Lee.
- Hoboken, NJ Wiley c2011.
- xii, 667p ill 25cm
9780470466346
Microelectromechanical systems
621.381 PRI 2011
9780470466346
Microelectromechanical systems
621.381 PRI 2011