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The science and engineering of microelectronic fabrication

Campbell, 1954-

The science and engineering of microelectronic fabrication / Stephen A. Campbell. - New York Oxford University Press 1996. - xv, 536p. ill. 25cm - Oxford series in electrical engineering .

Includes bibliographical references and index

ISBN: 0195105087

Subjects--Topical Terms:
Semiconductors--Design and construction

Dewey Class. No.: 621.38152 CAM 1996

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