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Fundamentals of microfabrication and nanotechnology : from MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications (vol. 3)

Madou, Marc J

Fundamentals of microfabrication and nanotechnology : from MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications (vol. 3) / Marc J. Madou.. - 3rd ed.. - Boca Raton CRC Press c2012. - 3v ill. (some col.) 29cm

ISBN: 9781420055160

Subjects--Topical Terms:
BioMEMS
Nanoelectromechanical systems

Dewey Class. No.: 620.5 MAD 2012

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