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Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.

By: Contributor(s): Material type: TextTextPublication details: Boston Artech House 2004.Edition: 2nd edDescription: xx, 283p. ill. 26cmISBN:
  • 1580535909
Subject(s): DDC classification:
  • 621.381 MAL 2004
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