TY  - BOOK
AU  - Sze, S. M.
TI  - ULSI technology 
SN  - 0070630623 
U1  - 621.395 ULS 1996 
PY  - 1996///
CY  - New York
PB  - McGraw Hill
KW  - Integrated circuits
KW  - Ultra large scale integration
N1  - Includes bibliographical references and index
ER  -