Madou, Marc J  <br/><br/>
Fundamentals of microfabrication and nanotechnology : solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology (vol. 1)  
/ Marc J. Madou.. 
 - 3rd ed.. 
 - Boca Raton  CRC Press  c2012. 
 - 3v  ill. (some col.)  29cm 
<br/><br/><label>ISBN: </label>9781420055115 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microfluidics<br/>Nanoelectromechanical systems<br/>Solid-state physics
<br/><br/><label>Dewey Class. No.: </label>620.5 MAD 2012