TY  - BOOK
AU  - Madou, Marc J 
TI  - Fundamentals of microfabrication and nanotechnology : solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology (vol. 1) 
SN  - 9781420055115
U1  - 620.5 MAD 2012 
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Microfluidics
KW  - Nanoelectromechanical systems
KW  - Solid-state physics
ER  -