Plummer

Silicon VLSI technology : fundamentals, practice and modeling / James D. Plummer, Michael D. Deal, Peter B. Griffin. - Upper Saddle River Prentice Hall 2000. - xiv, 817p. ill., col. 24cm

Includes index p.805 - 817

0130850373


Integrated cirsuits--Very large scale scale integration--Design and construction
Metal oxide semiconductors
Silicon
Silicon oxide films

621.395 PLU 2000