Silicon VLSI technology : fundamentals, practice and modeling
/ James D. Plummer, Michael D. Deal, Peter B. Griffin.
- Upper Saddle River Prentice Hall 2000.
- xiv, 817p. ill., col. 24cm
Includes index p.805 - 817
0130850373
Integrated cirsuits--Very large scale scale integration--Design and construction Metal oxide semiconductors Silicon Silicon oxide films