TY  - BOOK
AU  - Plummer 
AU  - Deal, Michael D.
AU  - Griffin, Peter B.
TI  - Silicon VLSI technology : fundamentals, practice and modeling 
SN  - 0130850373 
U1  - 621.395 PLU 2000 
PY  - 2000///
CY  - Upper Saddle River
PB  - Prentice Hall
KW  - Integrated cirsuits
KW  - Very large scale scale integration
KW  - Design and construction
KW  - Metal oxide semiconductors
KW  - Silicon
KW  - Silicon oxide films
N1  - Includes index p.805 - 817
ER  -