TY  - BOOK
AU  - Geng, Hwaiyu
TI  - Semiconductor manufacturing handbook 
SN  - 0071445595 
U1  - 621.38152 SEM 2005 
PY  - 2005///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Design and construction
KW  - Handbooks, manuals, etc
KW  - Semiconductors
N1  - Includes index
ER  -