TY  - BOOK
AU  - Lee, Ki Bang
TI  - Principles of microelectromechanical systems 
SN  - 9780470466346 
U1  - 621.381 PRI 2011 
PY  - 2011///
CY  - Hoboken, NJ
PB  - Wiley
KW  - Microelectromechanical systems
ER  -