VAN ZANT  <br/><br/>
Microchip fabrication : a practical guide to semiconductor processing  
/ Peter Van Zant. 
 - 3rd ed.. 
 - New York  McGraw Hill  1997. 
 - xvi, 623p.  ill.  24cm 
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>0070672504  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductros--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.38152 VAN 1997