TY  - BOOK
AU  - VAN ZANT 
TI  - Microchip fabrication : a practical guide to semiconductor processing 
SN  - 0070672504 
U1  - 621.38152 VAN 1997 
PY  - 1997///
CY  - New York
PB  - McGraw Hill
KW  - Semiconductros
KW  - Design and construction
N1  - Includes index
ER  -