Dielectric films for advanced microelectronics  
/ edited by Mikhail Baklanov, Martin Green, and Karen Maex. 
 - Hoboken  John Wiley & Sons  2007. 
 - xxii, 486p.  ill.  26cm 
 - Wiley series in materials for electronic and optoelectronic applications .
<br/><br/> Includes index p.477 - 486 
<br/><br/><label>ISBN: </label>9780470013601  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectric films<br/>Microelectronics--Materials
<br/><br/><label>Dewey Class. No.: </label>621.381 DIE 2007