TY  - BOOK
AU  - Baklanov, Mikhail
AU  - Green, Martin
TI  - Dielectric films for advanced microelectronics 
T2  - Wiley series in materials for electronic and optoelectronic applications
SN  - 9780470013601 
U1  - 621.381 DIE 2007 
PY  - 2007///
CY  - Hoboken
PB  - John Wiley & Sons
KW  - Dielectric films
KW  - Microelectronics
KW  - Materials
N1  - Includes index p.477 - 486
ER  -