TY - BOOK AU - Sankaran, Mohan. TI - Plasma processing of nanomaterials SN - 9781439866764 U1 - 620.5 PLA 2012 PY - 2012/// CY - Boca Raton PB - CRC Press KW - Nanostructured materials KW - Plasma engineering KW - SCIENCE / Physics KW - TECHNOLOGY & ENGINEERING / Electronics / Microelectronics KW - TECHNOLOGY & ENGINEERING / Material Science N1 - Includes bibliographical references and index ER -