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Fundamentals of microfabrication and nanotechnology : solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology (vol. 1) / Marc J. Madou.. by
  • Madou, Marc J
Edition: 3rd ed..
Material type: Text Text
Publication details: Boca Raton CRC Press c2012
Availability: Items available for loan: PERPUSTAKAAN POLITEKNIK SULTAN SALAHUDDIN ABDUL AZIZ SHAH (3)Call number: 620.5 MAD 2012, ...
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Fundamentals of microfabrication and nanotechnology : manufacturing techniques for microfabrication and nanotechnology (vol. 2) / Marc J. Madou.. by
  • Madou, Marc J
Edition: 3rd ed..
Material type: Text Text
Publication details: Boca Raton CRC Press c2012
Availability: Items available for loan: PERPUSTAKAAN POLITEKNIK SULTAN SALAHUDDIN ABDUL AZIZ SHAH (4)Call number: 620.5 MAD 2012, ...

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Fundamentals of microfabrication and nanotechnology : from MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications (vol. 3) / Marc J. Madou.. by
  • Madou, Marc J
Edition: 3rd ed..
Material type: Text Text
Publication details: Boca Raton CRC Press c2012
Availability: Items available for loan: PERPUSTAKAAN POLITEKNIK SULTAN SALAHUDDIN ABDUL AZIZ SHAH (3)Call number: 620.5 MAD 2012, ...

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