| 000 | 00669nam a2200205#a 4500 | ||
|---|---|---|---|
| 001 | 0000017888 | ||
| 008 | 211117s2020||||xx |||||||||||||| ||und|| | ||
| 020 | _a0071445595 | ||
| 082 | _a621.38152 SEM 2005 | ||
| 245 | 0 |
_aSemiconductor manufacturing handbook _c/ Hwaiyu Geng, editor in chief. |
|
| 260 |
_aNew York _bMcGraw-Hill _c2005. |
||
| 300 |
_a1v. (various pagings) _bill. _c25cm |
||
| 365 | _cMYR | ||
| 500 | _aIncludes index | ||
| 650 |
_aIntegrated circuits _xDesign and construction _xHandbooks, manuals, etc. |
||
| 650 |
_aSemiconductors _xDesign and construction _xHandbooks, manuals, etc. |
||
| 700 | _aGeng, Hwaiyu | ||
| 942 | _cBK-GN | ||
| 999 |
_c51226 _d51226 |
||