| 000 | 00656nam a2200205#a 4500 | ||
|---|---|---|---|
| 001 | 0000029178 | ||
| 008 | 211117s2020||||xx |||||||||||||| ||und|| | ||
| 020 |
_a9781420055160 _q(v.3) |
||
| 082 | _a620.5 MAD 2012 | ||
| 100 | _aMadou, Marc J | ||
| 245 | 0 |
_aFundamentals of microfabrication and nanotechnology : from MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications (vol. 3) _c/ Marc J. Madou.. |
|
| 250 | _a3rd ed.. | ||
| 260 |
_aBoca Raton _bCRC Press _cc2012. |
||
| 300 |
_a3v _bill. (some col.) _c29cm |
||
| 365 | _cMYR | ||
| 650 | _aBioMEMS | ||
| 650 | _aNanoelectromechanical systems | ||
| 942 | _cBK-GN | ||
| 999 |
_c84171 _d84171 |
||