The science and engineering of microelectronic fabrication / Stephen A. Campbell.

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Material type: Text

TextPublication details: New York Oxford University Press 2001.Edition: 2nd edDescription: xiv, 603p. ill. 24cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Book-GN	PERPUSTAKAAN POLITEKNIK SULTAN SALAHUDDIN ABDUL AZIZ SHAH	621.38152 CAM 2001 (Browse shelf(Opens below))	Available		0000032473

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